Resist Requirements and Limitations for Nanoscale Electron-Beam Patterning

Electron beam lithography patterning of sub-10 nm line using hydrogen silsesquioxane for nanoscale device applications

We investigated novel patterning techniques to produce ultrafine patterns for nanoscale devices. Hydrogen silsesquioxane HSQ was employed as a high-resolution negative tone inorganic electron beam resist. The nanoscale patterns with sub-10 nm linewidth were successfully formed. A trimming process of HSQ by the reactive ion etcher RIE played an important role for the formation of 5 nm nanowire p...

Polystyrene negative resist for high-resolution electron beam lithography

We studied the exposure behavior of low molecular weight polystyrene as a negative tone electron beam lithography (EBL) resist, with the goal of finding the ultimate achievable resolution. It demonstrated fairly well-defined patterning of a 20-nm period line array and a 15-nm period dot array, which are the densest patterns ever achieved using organic EBL resists. Such dense patterns can be ach...

Limitations of Electron Beam Conditioning for Free-Electron Lasers

Several ideas have been proposed to ‘condition’ an electron beam prior to the undulator of a Free-Electron Laser (FEL) by increasing each particle’s energy in proportion to the square of its transverse betatron amplitude. This conditioning enhances FEL gain by reducing the axial velocity spread within the electron bunch. We demonstrate that for symplectic beamlines, and independent of the metho...

Resist Mechanisms and Models in Electron-beam Lithography

Nanometer-Scale Patterning on PMMA Resist by Force Microscopy Lithography

Nanoscale science and technology has today mainly focused on the fabrication of nano devices. In this paper, we study the use of lithography process to build the desired nanostructures directly. Nanolithography on polymethylmethacrylate (PMMA) surface is carried out by using Atomic Force Microscope (AFM) equipped with silicon tip, in contact mode. The analysis of the results shows that the ...